Micropositioning system for large positioning distances, has two sticking electrodes, spring unit and electrostatic actuator forming positioning unit, where actuator has electrodes with comb-like structures that are interdigitated

摘要

The system has two electrostatic sticking electrodes (1, 2, 11, 12), electrically insulating spring unit (7) and an electrostatic actuator with two electrodes forming a positioning unit, and a flat electrode substrate (3). A unit is provided for selective electrical supply of the electrodes with the electrical potential. The actuator electrodes have electrically conducting comb-like structures (4) that are interdigitated. The sticking electrodes are mechanically connected with the spring unit, where the spring unit is made from a polymer e.g. polymethylmethacrylate (PMMA). The flat electrode substrate serves as a counter electrode to the sticking electrode.