Angle rates the sensor and the mounting structure of an angle rates sensor

摘要

An angle rates sensor comprises a substrate (10), a triggering the vibrator (30), which is in a position in a first direction (x) to vibrate, and an angle speed detection vibrator (40), which is in a position in a second direction (y) to vibrate. The sensor detects an angular velocity on the basis of a vibration of the angle speed detection vibrator (40) in the second direction (y), which is caused by a coriolis force, when the control of the vibrator (30) in the first direction (x) vibrates and the angular velocity to the sensor in a third direction (z) is exerted. The angle speed detection vibrator (40) has a length (l) along the second direction (y) and a width (w) along the first direction (x) to. A ratio (w / l) between the width (w) and the length (l) is equal to or greater than 0,1.