Open hole-based diffractive light modulator used in e.g. optical memory, has hole in reflective surface of micromirror to pass incident light

摘要

The modulator has holes (531a1-531a3) in reflective surface of micromirror (530a) to pass incident light. Another micromirror (503a) is arranged between substrate (501a) and micromirror (530a) to reflect incident light passing through open hole. A piezoelectric actuation unit moves the intermediate portion of the micromirrors, relatively to change intensity of diffracted light. Independent claims are also included for the following: (1) display device; and (2) printer.