Open hole-based diffractive light modulator used in e.g. optical memory, has upper micromirror comprising open holes at center, such that it reflects/diffracts incident light based on height difference between upper and lower micromirrors

摘要

The modulator includes lower micromirror (503a) and upper micromirror (530a) that is spaced at center from the lower micromirror. The upper micromirror has multiple open holes (531a) formed at the center, such that upper micromirror reflects or diffracts incident light depending on height difference between upper and lower micromirrors. An actuator moves center portion of upper micromirror layer comprising holes.