Illumination device for mask aligner, has solid state device ultra violet light sources that emit light with wavelength between specified nanometers, where sources are individually controllable and repeatedly activated and switched off

摘要

The device has a field lens and a set of solid state device ultra violet light sources (15) that emit light with wavelength that ranges between 250 nanometers and 450 nanometers. The solid state ultra violet light sources are individually controllable and are arranged on a cooling surface that is cooled with a cooling medium e.g. air or water. The light sources are repeatedly activated and switched off. An independent claim is also included for a mask aligner with a positioning device.