首页> 外国专利> Zones melting device with an improved susceptor and method for floating zone melting

Zones melting device with an improved susceptor and method for floating zone melting

机译:具有改进的基座的区域熔化装置和用于浮动区域熔化的方法

摘要

Zones melting device for the crucible-free zone melting of a silicon element (4) an irregular structure, comprising a hf - induction heating coil (7), a element retainers (2) and a crystal nucleus holder (5), the vertical alignment above and below the hf - induction heating coil (7) are arranged,the element retainers (2) is designed in such a way that it includes an end of the silicon member (4) holds an irregular shape, and the crystal nucleus holder (5) is designed in such a way that it holds a crystal nucleus of silicon,a device (3), with which the element retainers (2) with respect to the hf - induction heating coil (7) is adapted to be positioned such that the free end of the silicon member (4) an irregular shape in the vicinity of the hf - induction heating coil (7) is adapted to be brought, with the formation of a molten zone melting,a device (6), with which the crystal nucleus holder (5) with respect to the hf - induction heating coil (7) is adapted to be positioned such that the crystal nucleus with the molten zone comes into contact and melts,a device (8) for varying the relative arrangement of the hf - induction heating coil (7) to the silicon element..
机译:区域熔化装置,用于无坩埚区域熔化的硅元件(4)的不规则结构,包括高频感应加热线圈(7),元件保持器(2)和晶核保持器(5),垂直排列在高频感应加热线圈(7)的上方和下方排列,元件保持器(2)的设计方式应使其包括保持不规则形状的硅部件(4)的一端和晶核保持器( 5)以这样的方式设计,使得其保持硅的晶核,装置(3),相对于高频-感应加热线圈(7)的元件保持器(2)适于定位成使得硅元件(4)的自由端在高频感应加热线圈(7)附近形成不规则形状,适于在熔融区熔化的情况下带入装置(6),相对于hf-感应加热线圈(7)的晶核支架(5)的位置应使t晶核与熔融区接触并熔化,用于改变高频感应加热线圈(7)与硅元素相对位置的装置(8)。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号