Micro structure arrangement and method, apparatus and the form for the generation of the micro structure arrangement

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a highly durable mold or mold master for a micro-structure array. ;SOLUTION: A method for producing a mold or mold master for a micro- structure array has a process for forming an insulating mask layer 3 on the conductive part 2 of a substrate 1, a process forming a plurality of opening parts 4 having a proper shape to the mask layer 3 to expose the conductive part 2, a process for forming a first electrodeposition or electroplating layer 5 on the opening part 4 and the mask layer by electrodeposition or electroplating using the conductive part 2 as an electrode, a process for removing the mask layer 3 after forming the electrodeposition or electroplating layer 5 on the opening part 4 and the mask layer 3 and a process for forming a second electroplating layer 6 on the electrodeposition or electroplating layer 5 and the conductive part 2 after the mask layer 3 is removed.;COPYRIGHT: (C)2000,JPO