bolometer with a absorptionsschicht from a material with a low thermal conductivity and a low ablagerungstemperatur

摘要

A three-level infra-red bolometer (200) includes an active matrix level (210), a support level (220), a pair of posts (270) and an absorption level (230). The active matrix level (210) includes a substrate (212) having an integrated circuit, a pair of connecting terminals (214) and a protective layer (216) covering the substrate. The support level (220) includes a pair of bridges (240), each of the bridges being provided with a conduction line (265) formed on top thereof, wherein one end of the conduction line (265) is electrically connected to the respective connecting terminal (214). The absorption level (230) includes a serpentine bolometer element (285) surrounded by an absorber (295) made of silicon oxide (SiO2) or silicon oxy-nitride (SiOxNy). Each of the posts (270) includes an electrical conduit (272) surrounded by an insulating material (274) and is placed between the absorption level (230) and the bridge (240), in such a way that the serpentine bolometer element (285) is electrically connected to the integrated circuit through the electrical conduit (272), the conduction line (265) and the connecting terminal (214).