microscopic kapazitu00e4tmesssystem and test system

摘要

There is provided a probing and measurement system for measuring a capacitance value of a capacitance to be measured, by removing any influence made by a parasitic capacitance and a fluctuation thereof within a shield box (11). The probing and measurement system comprises a prober (1), a signal line having one end to be in contact with a sample to be measured, a shield line surrounding the signal line, and a capacitance measurement circuit (6). The capacitance measurement circuit (6) comprises an operational amplifier (61) having an inverting input terminal connected to the other end of the signal line and a non-inverting input terminal connected to the shield line, wherein an imaginary short state exists between the inverting input terminal and the non-inverting input terminal, and wherein a signal having a value corresponding to an electrostatic capacitance of the sample to be measured is outputted when an AC signal is applied to the non-inverting input terminal. Conductive portions of the shield box (11), conductive portions of a stand (13), a surface of the stand which contacts with the sample to be measured, and the shield line are placed at the same electric potential. IMAGE