首页> 外国专利> METHOD AND INSTALLATION FOR PROCESSING A GLASS SUBSTRATE INCORPORATING A MAGNETRON LINE AND A DEVICE GENERATING ATMOSPHERIC PRESSURE PLASMA.

METHOD AND INSTALLATION FOR PROCESSING A GLASS SUBSTRATE INCORPORATING A MAGNETRON LINE AND A DEVICE GENERATING ATMOSPHERIC PRESSURE PLASMA.

机译:用于处理包含磁控管和产生大气压力等离子体的玻璃基质的方法和装置。

摘要

- Process for the continuous treatment of a glass substrate whose dimension perpendicular to the direction of movement along said installation is greater than 1.5 m, said method being characterized in that it comprises inter alia: a step a magnetron line for effecting the deposition of successive thin layers, said line comprising a succession of sections, each section comprising at least one cathode made of a material or a precursor of the material to be deposited and operating according to the principle of sputtering under the action of a plasma generated by electric discharge in a plasma gas, - at least one step using an atmospheric plasma device, ie generating and allowing a plasma treatment in a gas substantially at atmospheric pressure.- Installation allowing the implementation of the process
机译:-连续处理玻璃基板的方法,所述玻璃基板的垂直于沿着所述装置的移动方向的尺寸大于1.5m,所述方法的特征在于,所述方法尤其包括:磁控管步骤,用于进行连续的薄层的沉积。层,所述线包括连续的部分,每个部分包括至少一个阴极,该阴极由材料或待沉积材料的前体制成,并根据溅射原理在由放电产生的等离子体的作用下进行溅射。等离子气体-使用大气等离子设备的至少一个步骤,即在基本处于大气压力的气体中生成并允许进行等离子处理。-允许执行该过程的安装

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