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METHOD AND INSTALLATION FOR PROCESSING A GLASS SUBSTRATE INCORPORATING A MAGNETRON LINE AND A DEVICE GENERATING ATMOSPHERIC PRESSURE PLASMA.
METHOD AND INSTALLATION FOR PROCESSING A GLASS SUBSTRATE INCORPORATING A MAGNETRON LINE AND A DEVICE GENERATING ATMOSPHERIC PRESSURE PLASMA.
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机译:用于处理包含磁控管和产生大气压力等离子体的玻璃基质的方法和装置。
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摘要
- Process for the continuous treatment of a glass substrate whose dimension perpendicular to the direction of movement along said installation is greater than 1.5 m, said method being characterized in that it comprises inter alia: a step a magnetron line for effecting the deposition of successive thin layers, said line comprising a succession of sections, each section comprising at least one cathode made of a material or a precursor of the material to be deposited and operating according to the principle of sputtering under the action of a plasma generated by electric discharge in a plasma gas, - at least one step using an atmospheric plasma device, ie generating and allowing a plasma treatment in a gas substantially at atmospheric pressure.- Installation allowing the implementation of the process
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