Fluoroscopic detector for X-ray imaging system, has source and drain electrodes and data line formed from conductive material layers with different thicknesses and compositions so that line`s thickness is greater than that of electrodes

摘要

The detector has a set of detector components, each including a thin film transistor (36) comprising source and drain electrodes (38, 40) formed from a primary conductive material layer and a data line (44) formed from a secondary conductive material layer. The thickness and composition of the primary layer are different from that of the secondary layer such that the data line has a thickness greater than that of the electrodes. The transistor has a via (50) to electrically connect the line and the drain electrode.