PIEZOELECTRIC VIBRATOR, AND PIEZOELECTRIC VIBRATOR GYROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator that can be downsized without decreasing a Qm value (mechanical quality factor; a parameter denoting the sharpness of mechanical vibration at resonance), and to provide a compact piezoelectric vibrator gyroscope with high accuracy and high reliability.;SOLUTION: A piezoelectric element 11 is provided with two electrode layers, a drive electrode and a detection electrode are provided to the first electrode layer through patterning, input output electrodes are provided to the second electrode layer at a non vibrated part of the piezoelectric vibrator 1 through patterning and a single electrode layer is adopted for the vibrated part of the piezoelectric vibrator 1.;COPYRIGHT: (C)2008,JPO&INPIT