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MASK BLANK FOR EXTREME ULTRAVIOLET RAY EXPOSURE, MASK FOR EXTREME ULTRAVIOLET RAY EXPOSURE, AND PATTERN TRANSFER METHOD
MASK BLANK FOR EXTREME ULTRAVIOLET RAY EXPOSURE, MASK FOR EXTREME ULTRAVIOLET RAY EXPOSURE, AND PATTERN TRANSFER METHOD
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机译:极端紫外线照射时的面罩空白,极端紫外线照射时的面罩和图案转移方法
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摘要
PROBLEM TO BE SOLVED: To provide an EUV exposure mask capable of securing contrast of a laminate including a capping film and a buffer film laminated on a multilayer film and an absorption film defect to improve defect inspection ability by DUV light.;SOLUTION: The EUV exposure mask includes the multilayer film, the capping film and the buffer film laminated on a substrate, and further includes the absorption film laminated thereon. Reflectivity of the laminate from the multilayer film to the absorption film is 6.7-≤20% in an ultraviolet region with a wavelength of 190-260 nm. The absorption film is formed so that its refractive index gradually increases toward the capping film.;COPYRIGHT: (C)2008,JPO&INPIT
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