首页> 外国专利> PATTERN FORMING METHOD, ORIENTATION FILM FORMING METHOD, LIQUID DROPLET DISCHARGE DEVICE, ORIENTATION FILM FORMING DEVICE AND ELECTRO-OPTICAL DEVICE, AND LIQUID CRYSTAL DISPLAY DEVICE

PATTERN FORMING METHOD, ORIENTATION FILM FORMING METHOD, LIQUID DROPLET DISCHARGE DEVICE, ORIENTATION FILM FORMING DEVICE AND ELECTRO-OPTICAL DEVICE, AND LIQUID CRYSTAL DISPLAY DEVICE

机译:图案形成方法,取向膜形成方法,液体液滴排出装置,取向膜形成装置和光电装置以及液晶显示装置

摘要

PROBLEM TO BE SOLVED: To provide a pattern forming method which improves the uniformity of film thickness of a pattern comprising liquid droplets by making the angle between the normal line of a substrate and the discharge direction of the liquid droplet correspond to the discharge interval of the liquid droplet, an orientation film forming method, a liquid droplet discharge device, an orientation film forming device and an electro-optical device, and a liquid crystal display device.;SOLUTION: The impact diameter R1 of the liquid droplet Fb is approximated by the projection image of the liquid droplet Fb projected in the discharge direction A. The oblique angle θ between the normal line of the opposite substrate 15 and the discharge direction A is set based on the liquid droplet diameter R0 of the discharged liquid droplet Fb, and the discharge interval W of the liquid droplet Fb so as to make the impact diameter R1 of the liquid droplet Fb equal to or larger than the discharge interval W of the liquid droplet Fb.;COPYRIGHT: (C)2007,JPO&INPIT
机译:解决的问题:提供一种图案形成方法,其通过使基板的法线与液滴的排出方向之间的角度对应于基板的排出间隔,来提高包含液滴的图案的膜厚的均匀性。液滴,取向膜形成方法,液滴排出装置,取向膜形成装置和电光装置以及液晶显示装置。解决方案:液滴Fb的冲击直径R1由下式近似:液滴Fb在排出方向A上投影的投影图像。基于排出的液滴Fb的液滴直径R0和液滴Fb的排出间隔W,设定相对基板15的法线与排出方向A之间的距离,以使碰撞的直径R1为基准。液滴Fb等于或大于液滴Fb的排放间隔W .;版权所有:(C)2007,日本特许经营&INPIT

著录项

  • 公开/公告号JP2007237162A

    专利类型

  • 公开/公告日2007-09-20

    原文格式PDF

  • 申请/专利权人 SEIKO EPSON CORP;

    申请/专利号JP20070002302

  • 发明设计人 IWATA YUJI;HIRUMA TAKASHI;KASUGA OSAMU;

    申请日2007-01-10

  • 分类号B05D3/00;B05D1/26;B05C5/00;B05C11/10;G02F1/13;G02F1/1337;

  • 国家 JP

  • 入库时间 2022-08-21 21:16:00

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