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PATTERN FORMING METHOD, ORIENTATION FILM FORMING METHOD, LIQUID DROPLET DISCHARGE DEVICE, ORIENTATION FILM FORMING DEVICE AND ELECTRO-OPTICAL DEVICE, AND LIQUID CRYSTAL DISPLAY DEVICE
PATTERN FORMING METHOD, ORIENTATION FILM FORMING METHOD, LIQUID DROPLET DISCHARGE DEVICE, ORIENTATION FILM FORMING DEVICE AND ELECTRO-OPTICAL DEVICE, AND LIQUID CRYSTAL DISPLAY DEVICE
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机译:图案形成方法,取向膜形成方法,液体液滴排出装置,取向膜形成装置和光电装置以及液晶显示装置
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摘要
PROBLEM TO BE SOLVED: To provide a pattern forming method which improves the uniformity of film thickness of a pattern comprising liquid droplets by making the angle between the normal line of a substrate and the discharge direction of the liquid droplet correspond to the discharge interval of the liquid droplet, an orientation film forming method, a liquid droplet discharge device, an orientation film forming device and an electro-optical device, and a liquid crystal display device.;SOLUTION: The impact diameter R1 of the liquid droplet Fb is approximated by the projection image of the liquid droplet Fb projected in the discharge direction A. The oblique angle θ between the normal line of the opposite substrate 15 and the discharge direction A is set based on the liquid droplet diameter R0 of the discharged liquid droplet Fb, and the discharge interval W of the liquid droplet Fb so as to make the impact diameter R1 of the liquid droplet Fb equal to or larger than the discharge interval W of the liquid droplet Fb.;COPYRIGHT: (C)2007,JPO&INPIT
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