METHOD FOR MANUFACTURING FLOW PATH UNIT FOR LIQUID JETTING HEAD AND CONNECTING JIG FOR FLOW PATH UNIT FOR LIQUID JETTING HEAD

摘要

PROBLEM TO BE SOLVED: To join respective flow path unit constituting members to unify them by regulating with a good accuracy relative positions of flow path unit constituting members by positional pins and preventing a flow path forming substrate consisting of a silicon single crystal base material from cracking during drying an adhesive at higher temperature.;SOLUTION: In an adhering process, an adhesion protecting plate 50 in which through-holes 52 are formed at positions corresponding to respective reference holes 42 of the flow path forming substrate 30, is laminated with the outside face of a nozzle forming substrate 31 and the outside face of a sealing plate 29, and positioning pins 49 stood at positions corresponding to the respective reference holes of the flow path forming substrate are respectively inserted through the respective reference holes and through-holes 43 and 44 on a pedestal 47, and pressurizing is performed under a condition that the flow path forming substrate, the nozzle forming substrate and the sealing plate are positioned. The adhesion protecting plate is composed of a metal base material whose thermal coefficient of expansion is smaller than that of the pedestal, a pressing plate 48, the nozzle forming substrate and the sealing plate.;COPYRIGHT: (C)2007,JPO&INPIT