PATTERN INSPECTION SYSTEM, PATTERN INSPECTION METHOD, SAMPLE TO BE INSPECTED, AND METHOD FOR MANAGING SAMPLE TO BE INSPECTED

摘要

PROBLEM TO BE SOLVED: To provide a pattern inspection system and a pattern inspection method for inspecting a deterioration of an image of a sample to be inspected, a sample to be inspected obtained by it, and a method for managing a sample to be inspected.;SOLUTION: The pattern inspection system comprises an optical image acquisition section for acquiring an optical image of the sample to be inspected, a reference-image memory device for storing the optical image of the sample to be inspected as a reference image, an image-to-be-inspected memory device for acquiring the optical image of the sample to be inspected by the optical image acquisition section after the acquisition of the reference image and storing the optical image as an image to be inspected, and a comparison processing section for comparing the reference image with the image to be inspected. The pattern inspection system compares the reference image of the sample to be inspected read from the reference-image memory device with the image to be inspected of the sample to be inspected read from the image-to-be-inspected memory device.;COPYRIGHT: (C)2007,JPO&INPIT