CROSS-SECTION INSPECTING SYSTEM USING TOTAL REFLECTIVE PATTERNS CAPABLE OF INSPECTING A SHAPE OF A CROSS-SECTION WITHOUT DAMAGES OF A SAMPLE, A CROSS-SECTION INSPECTING METHOD USING THE SAME, A CROSS-SECTION INSPECTING SYSTEM SUING A REPLICA MOLD, AND A CROSS-SECTION INSPECTING METHOD USING THE SAME

摘要

PURPOSE: A cross-section inspecting system using total reflective patterns, a cross-section inspecting method using the same, a cross-section inspecting system suing a replica mold, and a cross-section inspecting method using the same are provided to form total reflective patterns having a total reflecting surface in a pattern forming process, thereby inspecting a shape of a cross-section of the pattern formed in a thin film sample on a real time basis without using expensive equipment.;CONSTITUTION: A cross-section inspecting system using total reflective patterns comprises a total reflective pattern unit(120), a light source(200), and an inspecting unit(300). The total reflective pattern unit comprises a total reflecting surface. The light source is arranged in one surface of a thin film sample so that lights passes through the cross-section of the pattern and successively irradiated to the total reflective pattern unit.;COPYRIGHT KIPO 2013