CRYSTALLIZATION DEVICE, VIBRATION EVALUATION METHOD THEREOF, AND OPTICAL BASE DESIGN METHOD OF CRYSTALLIZATION DEVICE

摘要

PROBLEM TO BE SOLVED: To enhance stiffness in an optical base section by performing precise positioning in submicrons and further reducing the vibration of a vibration-proof device in a crystallization device.;SOLUTION: A surface plate for supporting a substrate stage is subjected to feedforward control to the drive of a substrate stage, thus reducing the vibration of the vibration-proof device. Also, by obtaining displacement when the optical base is moved with the same movement as that of the surface plate when driving the substrate stage, the optical base is evaluated. By repeating the design of the optical base based on the evaluation, the stiffness of the optical base is enhanced. The crystallization device 1 comprises the optical base 4 for supporting an optical system, the surface plate 5 for supporting and fixing the substrate stage 3 and the optical base 4, and the vibration-proof device 6 for supporting the surface plate 5. The vibration-proof device 6 is subjected to feedforward control, based on the operation of the substrate stage when operating the substrate stage 3, thus improving the reduction of vibration by the vibration-proof device 6.;COPYRIGHT: (C)2007,JPO&INPIT