PIEZOELECTRIC ACTUATOR USING AEROSOL DEPOSITION METHOD, METHOD FOR PRODUCING INKJET HEAD AND INKJET PRINTER, AND PIEZOELECTRIC ACTUATOR INKJET HEAD, AND INKJET PRINTER

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing technique of a piezoelectric actuator for an inkjet head capable of suppressing any degradation in printing quality due to thickness distribution as much as possible even when the thickness distribution occurs in the thin film layer formed on a substrate with the AD method.;SOLUTION: A piezoelectric material layer 31 is formed on a vibration plate 30 by jetting aerosol which contains particles of a piezoelectric material and a carrier gas, from a film forming nozzle to the vibration plate 30 while moving the film forming nozzle relative to the vibration plate 30 in a direction perpendicular to the scanning direction of the inkjet head 1.;COPYRIGHT: (C)2008,JPO&INPIT