NANO-SILICON PARTICLE EXCELLENT IN DURABILITY OF LIGHT EMISSION BRIGHTNESS AND ITS PRODUCING METHOD

摘要

PROBLEM TO BE SOLVED: To provide nano-silicon particles excellent in durability of light emission brightness, which exhibit high brightness, emit fluorescence stably and each of which is coated with a protective film for deterioration prevention; and to provide a method for producing the same.;SOLUTION: The nano-silicon particles excellent in durability of light emission brightness emit fluorescence when they are irradiated with ultraviolet rays or visual rays and are characterized in that nano-silicon particles each having a particle size of ≤3.5 nm are coated with a protective film for deterioration prevention. The nano-silicon particles are produced by applying the protective film for deterioration prevention on the surface of the nano-silicon particles applied on a substrate by a high frequency plasma CVD process.;COPYRIGHT: (C)2007,JPO&INPIT