CHARGED PARTICLE BEAM DEFLECTING/CONVERGING METHOD AND CHARGED PARTICLE BEAM DEFLECTING/CONVERGING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for deflecting and converging a charged particle beam with a simple constitution, simple operation and at a low cost.;SOLUTION: When a charged particle beam is emitted from an opening at one end of a tube-shape insulation object of which the inner diameter is squeezed from one end to the other end so that the inner diameter of opening at one end is smaller than the inner diameter of the opening at the other end, and the charged particle beam is introduced in the tube of insulation object from the opening at one end, charging at the collision part of the charged particles to the inner wall of the tube-shape insulation object and deflection of the charged particles due to electric field associated with the charging at the collision part repeatedly occur in the tube inside of the tube-shape insulation object. Thus, the charged particle beam introduced in the tube from the opening of one end is converged without touching the tube inside of the insulation object and extruded outside from the opening at the other end.;COPYRIGHT: (C)2007,JPO&INPIT