MEASURING METHOD OF X-RAY MAGNETIC CIRCULAR DICHROISM OF MAGNETIC MULTILAYER FILM

摘要

PPROBLEM TO BE SOLVED: To measure X-ray magnetic circular dichroism without disturbing the magnetic characteristic of a magnetic multilayer film, and to observe the magnetic characteristics near a layer interface or a magnetic characteristic distribution in the film thickness direction. PSOLUTION: An incident angle θ is controlled so that each electric field intensity E(a), E(b) of a standing wave in the magnetic multilayer film 1, excited by an X-ray 5 entering at the incident angle θ wherein the reflection X-ray intensity is enhanced by interference, based on a laminated structure of the magnetic multilayer film 1, has the maximum intensity on the interface between layers 1a, 1b in the magnetic multilayer film 1; and the incident X-ray 5 is switched into clockwise circular polarization and counterclockwise circular polarization relative to the progression direction, and the difference of X-ray absorption before and after switching is measured, to thereby measure the X-ray magnetic circular dichroism of the magnetic multilayer film 1. Each position of the antinodes and the nodes of the standing wave is controlled by the incident angle θ, and the position of the maximum electric field strength is allowed to agree with the interface to be measured, to thereby measure selectively the magnetic characteristic near the interface. PCOPYRIGHT: (C)2007,JPO&INPIT