Method for measuring X-ray magnetic circular dichroism of magnetic multilayer film

摘要

PPROBLEM TO BE SOLVED: To measure X-ray magnetic circular dichroism without disturbing the magnetic characteristic of a magnetic multilayer film, and to observe the magnetic characteristics near a layer interface or a magnetic characteristic distribution in the film thickness direction. PSOLUTION: An incident angle is controlled so that each electric field intensity E(a), E(b) of a standing wave in the magnetic multilayer film 1, excited by an X-ray 5 entering at the incident angle wherein the reflection X-ray intensity is enhanced by interference, based on a laminated structure of the magnetic multilayer film 1, has the maximum intensity on the interface between layers 1a, 1b in the magnetic multilayer film 1; and the incident X-ray 5 is switched into clockwise circular polarization and counterclockwise circular polarization relative to the progression direction, and the difference of X-ray absorption before and after switching is measured, to thereby measure the X-ray magnetic circular dichroism of the magnetic multilayer film 1. Each position of the antinodes and the nodes of the standing wave is controlled by the incident angle , and the position of the maximum electric field strength is allowed to agree with the interface to be measured, to thereby measure selectively the magnetic characteristic near the interface. PCOPYRIGHT: (C)2007,JPO&INPIT