MANUFACTURING PROCESS OF ELECTROSTATIC ACTUATOR, MANUFACTURING PROCESS OF DROPLET DISCHARGE HEAD, MANUFACTURING PROCESS OF DROPLET EJECTION APPARATUS, DROPLET DISCHARGE HEAD AND DROPLET EJECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing process of an electrostatic actuator which can assure effectively an electric potential between an insulator layer formed in a silicon substrate and electrodes formed in a glass substrate, while establishing separately independently the thickness of an insulator film, and the thickness of the electrode when the anode joining of the silicon substrate and the glass substrate is carried out.;SOLUTION: The manufacturing process of the electrostatic actuator includes the steps of forming the insulator film 11 made thinner than the thickness of the descrete electrode 12 in a cavity plate 1, forming an opening for contacting the descrete electrode 12 to the cavity plate 1 to an equipotential contact 24 in the insulator film 11, forming a projection for contacting the descrete electrode 12 at the equipotential contact 24 in the glass substrate 2 so that it may become lower than the sealing surface of the glass substrate 2 and the cavity plate 1, connecting the cavity plate 1, in which the insulator film 11 and the opening are formed, to the glass substrate 2, in which the projection and the descrete electrode 12 were formed at the equipotential contact 24, and carrying out the anode joining.;COPYRIGHT: (C)2007,JPO&INPIT