MANUFACTURING PROCESS OF NOZZLE SUBSTRATE, MANUFACTURING PROCESS OF DROPLET DISCHARGE HEAD, DROPLET DISCHARGE HEAD, AND DROPLET EJECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing process of a nozzle substrate which cements firmly with a supporting substrate at the time of working of a substrate and keeps the substrate not damaged, moreover, enables the easy release of the supporting substrate from the substrate, prevents a crack from reaching even a part for a head section when the crack arises in the substrate, facilitates handling thereby, and is useful to an improvement in yield or productivity.;SOLUTION: The manufacturing process of the nozzle substrate comprises the step of forming a recess used as a nozzle hole 11 by etching working, the step of sticking the first supporting substrate 61 on a surface by a working side which has the recess, a step of opening the tip of the recess by forming a sheet metal in a desired thickness from the substrate to be processed 100 from the surface which stuck the first supporting substrate and the surface by the opposite side, the step of sticking the second supporting substrate 62 on the surface by the side of opening to which the opening of the recess is carried out, the step of joining the third supporting substrate to the stripped surface by exfoliating the first supporting substrate from the processed substrate, and the step of exfoliating the second supporting substrate from the processed substrate.;COPYRIGHT: (C)2008,JPO&INPIT