MANUFACTURING METHOD OF MICRO-OPTICAL DEVICE, MANUFACTURING METHOD OF MOLD FOR MICRO-OPTICAL DEVICE AND MICRO-OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a micro-optical device or the like capable of forming a complicated three-dimensional structure precisely, rapidly and simply.;SOLUTION: In the manufacturing method of the micro-optical device, a photosetting resin liquid is selectively irradiated with light to form a cured resin layer by repeating collective exposure using a projection region as a unit to form a cured resin layer and the cured resin layer is successively laminated to form a three-dimensional shape. This manufacturing method is especially effective in the case that the structure of the micro-optical device or the like is the complicated three-dimensional structure having an overhang part.;COPYRIGHT: (C)2007,JPO&INPIT