DIAPHRAGM, DIAPHRAGM ASSEMBLY, LIQUID DROP EJECTION HEAD, AND LIQUID DROP EJECTOR

摘要

PROBLEM TO BE SOLVED: To provide a diaphragm producing sufficient deformation even in case of small area and ensuring a high discharge volume efficiency even when it is used in a small pressure chamber, and to provide a diaphragm assembly including the diaphragm, a liquid drop ejection head equipped with the diaphragm, and a liquid drop ejector equipped with the liquid drop ejection head.;SOLUTION: The diaphragm used in such a liquid drop ejection head as the wall face of a pressure chamber communicating with a nozzle is formed at least partially of the diaphragm and ejecting a liquid drop from the nozzle by vibrating the diaphragm consists of a metal layer and a resin layer wherein the resin layer is thicker than the metal layer. A diaphragm assembly having the diaphragm, a liquid drop ejection head, and a liquid drop ejector are also provided.;COPYRIGHT: (C)2007,JPO&INPIT