POLARIZATION CHARACTERISTIC MEASURING APPARATUS, POLARIZATION CHARACTERISTIC MEASURING METHOD, EXPOSURE APPARATUS, MEASURING MEMBER, AND METHOD FOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a polarization characteristic measuring apparatus for measuring the polarization characteristics of an optical system to be inspected, in accordance with a simplified structure.;SOLUTION: The polarization characteristics measuring apparatus for measuring polarization characteristics of the optical system to be inspected (PL) includes parallel light flux suppliers (1 to 8) for supplying substantially parallel light fluxes; a polarizer (11b) for selectively emitting the predetermined light in the polarized state from the almost parallel light fluxes from the parallel light flux suppliers; a light flux diverging means (11c) for converting the substantially parallel light flux transmitted through the polarizer into a light flux having the predetermined divergence angle; and a polarizing state measure (9) for measuring the polarized state of the light flux via the light flux diverging means and the optical system to be inspected.;COPYRIGHT: (C)2007,JPO&INPIT