FILM ADHESIVENESS MEASURING METHOD, FILM ADHESIVENESS MEASURING DEVICE AND SAMPLE FOR MEASURING FILM ADHESIVENESS

摘要

PROBLEM TO BE SOLVED: To provide a technology which needs less limit of a measuring evaluation object, and by which the adhesiveness of a film can be quantitatively evaluated.;SOLUTION: The film adhesiveness measuring method includes a step (1) to provide a film with a specific shape that has a profile with only one peak if, when any force is given from the side of a film provided on a substrate, a relationship between a moving distance of the film and the strength of the force is plotted in an X-Y coordinate; and a force action step (2) to give any force from the side of the film so as to displace and peel off the film. In this case, the step (1) includes a first step to provide a large film on the substrate by a thin-film formation means, a second step to provide resist on the film, a third step to process the resist into a specified shape having a profile with only one peak in case where, when any force is given from the side of the film, a relationship between the moving distance of the film and the strength of the force is plotted in an X-Y coordinate, and a fourth step to process the film into a specified shape while using the resist having the shape as a mask.;COPYRIGHT: (C)2007,JPO&INPIT