MULTILAYER-FILM REFLECTOR, ALIGNER, ALIGNING METHOD, AND MANUFACTURING METHOD OF DEVICE HAVING FINE PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a multilayer-film reflector capable of removing a multilayer film from a substrate efficiently.;SOLUTION: The multilayer-film reflector piles up a multilayer film 103 on a substrate 101. A plurality of holes 107 for guiding a removing liquid to an area between the substrate 101 and the multilayer film 103 are provided on the multilayer-film reflector. The removing liquid is guided to an area between the substrate 101 and the multilayer film 103 by a hole 107 provided on the substrate 101, thus accelerating the peeling of the multilayer film 103 from the substrate 101.;COPYRIGHT: (C)2007,JPO&INPIT