MINUTE STRUCTURE, MOLD FOR TRANSFERRING MINUTE STRUCTURE, MOLD FOR REPLICA, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To duplicate a plurality of molds in each of which a minute structure is formed accurately in a nano-imprint method of a pattern transfer technique for forming a structure having a minute shape.;SOLUTION: In the minute structure formed by pushing a mold with a minute uneven pattern formed on the surface to a transcribed body and a mold for transferring a minute structure for forming the minute uneven pattern on the surface of the transcribed body, the minute structure and the mold for transferring the minute structure duplicate the minute unevenness of the mold accurately by reacting a monomer or an oligomer having a terminal reactive functional group which is packed in the minute uneven shape of a master mold.;COPYRIGHT: (C)2007,JPO&INPIT