SINGLE CRYSTAL PULLING APPARATUS, SILICON SINGLE CRYSTAL PULLING APPARATUS AND SILICON SINGLE CRYSTAL PULLING METHOD

摘要

PPROBLEM TO BE SOLVED: To provide a single crystal pulling apparatus which is provided with a vibration damping mechanism that can prevent a single crystal from swinging by detecting an earthquake before the single crystal swings without accompanying a large scale reconstruction. PSOLUTION: In a single crystal pulling apparatus for pulling a single crystal using the CZ method, the present single crystal pulling apparatus controls the swinging of the single crystal by providing a vibration damping mechanism 9 which is provided on a pulling chamber 2a at the upper part of the single crystal pulling apparatus 1 and on which the pulling mechanism 7 for pulling the single crystal by wire 11 is arranged and which is provided with an XY table 12 capable of advancing/retreating in a 2 dimensional direction in the horizontal plane and provided with a drive mechanism capable of retreating the XY table 12, by providing a displacement gauge 15 mounted on a base on which the single crystal pulling apparatus 1 is placed and fixed, and by providing a control means for controlling said vibration damping mechanism 9 on the basis of the calculated results obtained by calculating the moving quality and the moving speed of the single crystal pulling apparatus 1 on the basis of the displacement information outputted from the displacement gauge 15. PCOPYRIGHT: (C)2007,JPO&INPIT