FINE-PROCESSING METHOD FOR GLASSY CARBON, GLASSY CARBON-PROCESSED ARTICLE, AND FINELY-PROCESSED ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a fine-processing method for a glassy carbon which can be suitably used for the formation of an optional uneven pattern on a glassy carbon, which has been difficult heretofore.;SOLUTION: The fine-processing method for the glassy carbon comprises the processes of: coating the glassy carbon substrate with an ultraviolet ray-sensitive resin used in the development of a photograph; forming the resin into a desired micropattern by the exposure and development of the resin; dry-etching the resin, to transfer the micropattern onto the glassy carbon substrate.;COPYRIGHT: (C)2007,JPO&INPIT