SUBSTRATE TREATMENT UNIT, BATCH ORGANIZATION UNIT, BATCH ORGANIZATION METHOD AND BATCH ORGANIZATION PROGRAM

摘要

PPROBLEM TO BE SOLVED: To provide a substrate treatment unit capable of changing the placement order of substrates constituting a batch for batch treatment, a batch organization unit, and its method and a program. PSOLUTION: This substrate treatment unit 1 has a basic treatment unit 7 and a batch organization unit organizing a batch for batch treatment by the basic treatment unit 7. This treatment unit also comprises a substrate convey mechanism 14 for conveying a number of substrates 2 accommodated in each carrier 3, a batch formation mechanism 15 for changing placement pitches of substrates 2 conveyed with the substrate convey mechanism 14 for batch formation, and a placement order change mechanism 16 for changing the placement order of substrates 2 conveyed by the substrate convey mechanism 14. A number of substrates 2 accommodated in each carrier 3 can be conveyed to the placement order change mechanism 16 with the substrate convey mechanism 14 to change the placement order of substrates 2, the order-changed substrates 2 can be conveyed to the batch formation mechanism 15, and then the placement pitches of substrates 2 can be changed by the batch formation mechanism 15 for batch formation. PCOPYRIGHT: (C)2007,JPO&INPIT