METHOD OF MANUFACTURING BURIED SUBSTRATE CRYSTAL AND BURIED SUBSTRATE CRYSTAL

摘要

PPROBLEM TO BE SOLVED: To provide a method for manufacturing a single crystal substrate, the method being suitable for manufacturing the single crystal substrate in which a single crystal of a polarity A is formed on at least the surface of a crystal in which parts having different polarities A and B and having opposite structure with respect to the crystal orientation coexist, and a device is fabricated on the single crystal of the polarity A. PSOLUTION: In the crystal in which the parts having the different polarities A and B and each having the opposite direction structure with respect to the crystal orientation coexist, the part having the polarity B is etched to remove the surface part or is covered with a different kind of substance M without removing the surface part, and further, the growth of the same crystal is performed to cover the surface with a crystal A' having the polarity A. PCOPYRIGHT: (C)2007,JPO&INPIT