Precision Rezanano processing method using a UV ultrafast laser pulses

摘要

Method for producing on the workpiece, a micro-structure having at least one element having a dimension of less than 200nm. I generates a pulse of UV laser light having a peak wavelength of about 380nm and less than a period of less than about fps. I focused on the (306) beam spot of the diffraction limit substantially the target area of ​​the workpiece (124), a pulse of UV laser light of these. 200nm is less than the diameter of the portion processed by one pulse of UV laser beam within the target area (304), the fluence (306) beam spot at the diffraction limit this substantially in the target area the work piece (124) I want to control as is.