METHOD AND APPARATUS FOR EVALUATING DAC SETTLING CHARACTERISTICS, AND ELECTRON BEAM LITHOGRAPHY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for evaluating DAC settling characteristics capable of highly accurately evaluating settling characteristics of a DAC amplifier, and an electron beam lithography device capable of highly accurately detecting abnormality in the DAC settling characteristics.;SOLUTION: The method of evaluating the DAC settling characteristics includes steps of inputting a first evaluation signal into a first DAC amplifier 11a; outputting a first output voltage via a first measurement resistor element 12a connected to an output side of the first DAC amplifier 11a, and a first delay compensation element 13a connected in parallel with the element 12a; inputting a second evaluation signal with a reverse phase to that of the first evaluation signal into a second DAC amplifier 11b; outputting a second output voltage via a second measurement resistor element 12b connected to an output side of the second DAC amplifier 11b, and a second delay compensation element 13b connected in parallel with the element 12b; and evaluating the DAC settling characteristics by measuring settling time of the DAC amplifiers from a sum of the first and second output voltages.;COPYRIGHT: (C)2007,JPO&INPIT