SUPERCONDUCTIVE DIAMOND SUBSTRATE, SUPERCONDUCTIVE DEVICE, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide superconductive diamond laminated film which is equipped with a (111) crystal plane on its surface, doped with B with high concentration, and equipped with outstanding superconductivity properties, and to provide a device and a manufacturing method.;SOLUTION: The surface of a lower diamond film 2 is formed of the diamond (111) crystal plane, and quadrangular pyramidal diamond projections are formed on the above surface through a vapor-phase composition method. A superconductive diamond film 4 is laminated on the lower diamond film 2 and doped with boron with high concentration, wherein for example the atomic ratio of boron B to carbon C (B/C) is set at 5.0% or above. The diamond particles are oriented in a certain direction.;COPYRIGHT: (C)2007,JPO&INPIT