MOISTURE ABSORPTION FILM FORMING METHOD, MOISTURE ABSORPTION FILM FORMING DEVICE, AND ORGANIC ELECTROLUMINESCENT ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a forming method of a moisture absorbing film capable of forming a metal oxide moisture absorbing film on an organic EL element substrate at a high film forming rate without causing performance deterioration of an organic EL element due to temperature rise of the element substrate.;SOLUTION: This is the forming method of the moisture absorbing film 18 of alkaline earth metal oxide on the element substrate 10 provided with the organic EL element having an organic compound layer including at least a light-emitting layer 4 between a pair of electrodes 2, 6 by using an alkaline earth metal target 13 by a reactive sputtering method under O₂ gas introduction, and before film formation by the reactive sputtering method after installment of the target 13 at a sputtering device, removing treatment of an insulation coating of a target surface is carried out by a high frequency sputtering method.;COPYRIGHT: (C)2007,JPO&INPIT