PROBLEM TO BE SOLVED: To prevent alteration of the surface of a protecting film to carbonate or hydroxide in a flat panel display(FPD) fabricating process. ;SOLUTION: First, a substrate 13 is covered with a protecting film 14 formed of alkali earth metal oxide, alkali earth metal composite oxide, rare earth metal oxide or composite oxide composed of alkali earth metal and rare earth metal, followed by surface treatment with a gaseous fruorinating agent, thereby forming a fluoride layer 15 on the protecting film 14. Next, an FPD 10 is assembled with the substrate 13, and thereafter, the fluoride layer 15 is removed. The fluoride layer 15 is preferably MOXFY (where M represents alkali earth metal, composite metal composed of alkali earth metal, rare earth metal or composite oxide composed of alkali earth metal and rare earth metal, 0≤X2 and 0Y≤4).;COPYRIGHT: (C)2000,JPO
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机译:要解决的问题:在平板显示器(FPD)的制造过程中,要防止保护膜的表面变成碳酸盐或氢氧化物。 ;解决方案:首先,在基板13上覆盖一层由碱土金属氧化物,碱土金属复合氧化物,稀土金属氧化物或由碱土金属和稀土金属组成的复合氧化物形成的保护膜14,然后进行表面处理。然后,在保护膜14上形成氟化物层15。接着,将FPD 10与基板13组装,然后去除氟化物层15。氟化物层15优选为MOXFY(其中M表示碱土金属,由碱土金属组成的复合金属,稀土金属或由碱土金属和稀土金属组成的复合氧化物,0le; X <2和0 展开▼