MANUFACTURING METHOD FOR LIQUID EJECTING HEAD, LIQUID EJECTING HEAD AND LIQUID EJECTOR

摘要

PROBLEM TO BE SOLVED: To effectively avoid damage of eaves brought about because of a flattening pattern even when a nozzle end face is flattened by formation of the flattening pattern, by patterning a head chip by the shape of a liquid chamber, then forming a coating layer, removing a member of the patterning, thereby forming the liquid chamber and the like in application of a manufacturing method for a liquid ejecting head, a liquid ejecting head and a liquid ejector to, for example, a line printer by an ink jet system.;SOLUTION: In a process of working the coating layer, when the flattening pattern is removed by a process of removing the pattern, the coating layer is projected like the eaves to form an opening in the range of 4-0.3 [μm] from an outside wall face of a gap formed by the removal of the flattening pattern. By so forming the opening, the generation of cracks and the like can be effectively avoided even if the wiping process is repeatedly carried out. Thus the damage of the eaves brought about because of the flattening pattern can be avoided effectively.;COPYRIGHT: (C)2007,JPO&INPIT