LIQUID DROPLET EJECTING HEAD, LIQUID DROPLET EJECTOR CARRYING LIQUID DROPLET EJECTING HEAD, MANUFACTURING METHOD FOR LIQUID DROPLET EJECTING HEAD, AND MANUFACTURING METHOD FOR LIQUID DROPLET EJECTOR APPLYING MANUFACTURING METHOD FOR LIQUID DROPLET EJECTING HEAD

摘要

PPROBLEM TO BE SOLVED: To provide a liquid droplet ejecting head or the like which has a liquid-resistant protective film capable of securing chemical resistance and hydrophilic properties by an inexpensive material. PSOLUTION: The liquid droplet ejecting head 10 is equipped with a plurality of nozzle holes 11 which eject liquid droplets, a plurality of ejection chambers 21 communicating with respective nozzle holes 11, a common liquid droplet chamber 23 which is made to communicate with each ejection chamber 21 to supply the liquid to the ejection chamber 21, a diaphragm 6 formed on a wall surface of the ejection chamber 21, and a counter electrode 5 arranged opposite to the diaphragm 6. The liquid droplet ejecting head 10 is comprised of a plurality of stacked substrates 1, 2 and 3. The hydrophilic liquid-resistant protective films 15 and 18 composed of a nitrogen-introduced diamond-like carbon film are formed to surfaces in touch with the liquid of the substrates 1, 2 and 3. The liquid-resistant protective films 15 and 18 may be a single-layer structure or may be a structure of a plurality of layers. PCOPYRIGHT: (C)2010,JPO&INPIT