SYSTEM AND METHOD FOR SPECIFYING INFERIORITY CAUSE PROCESS, AND COMPUTER READABLE RECORDING MEDIUM RECORDING PROGRAM FOR CARRYING OUT THIS METHOD

摘要

PROBLEM TO BE SOLVED: To provide a system for specifying an inferiority cause process that can easily specify a process being the cause of inferiority occurrence in a manufacturing process for carrying out one or more processes for a substrate.;SOLUTION: The system 1 for specifying the inferiority cause process comprises an inspection information input part for inputting inspection information acquired to be inspected concerning one or more inferiority classifications in each closed region divided by the surface of the substrate after completing a prescribed process for the substrate, a map data creation part 14 for creating map data by accumulating data indicating a quality of an inspection result of each closed region on the substrate on one or more substrates processed in the manufacturing process concerning the inferiority classification designated out of a plurality of the inferiority classifications, and a characteristic extraction part 15 for extracting distribution of the closed region being inferiority on the substrate on the basis of the map data.;COPYRIGHT: (C)2007,JPO&INPIT