COMMUNICATION-RELATED OPTICAL DEVICE ELEMENT USING amp;beta;-FeSi2

摘要

PROBLEM TO BE SOLVED: To provide a communication-related optical device element in which a β-FeSi₂ single crystal layer is arranged on an inexpensive SOI substrate having a large diameter.;SOLUTION: The thickness of an Si layer of the surface of a commercially available SOI substrate is thinned to about 5 nm, and subsequently, Fe atoms are implanted into the Si layer by an ion implantation method. In this way, the β-FeSi₂ single crystal layer can be easily formed and the inexpensive and safe light-emitting device element substrate for communication can be obtained.;COPYRIGHT: (C)2007,JPO&INPIT