METHOD OF FORMING DRIVE SIGNAL TO HF ENERGY GENERATOR, HF GENERATOR DRIVE DEVICE, AND HF PLASMA EXCITING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a drive signal to an HF energy generator capable of controlling the transmission of energy to the HF energy generator or a plasma process so that it can be adjusted flexibly, and to provide an HF energy generator drive and an HF plasma exciting device.;SOLUTION: In the method for forming two drive signals C, D for driving each HF energy generator by the HF generator drive 2 to two HF energy generators for supplying HF energy to the plasma process, respective drive signals C, D are formed by digital functional generators, especially advantageously sinusoidal wave generators, for respective functional generators 13, 14.;COPYRIGHT: (C)2007,JPO&INPIT