SELECTION METHOD OF LATTICE MODEL FOR CORRECTING TREATMENT RECIPE OF LATTICE DEFORMATION IN LITHOGRAPHY EQUIPMENT, AND LITHOGRAPHIC ASSEMBLY USING THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a selection method of a lattice model for correcting a treatment recipe of lattice deformations in lithographic equipment.;SOLUTION: A plurality of sets of lattice models are provided. Alignment data is acquired by executing alignment measurement for a plurality of alignment marks on a plurality of substrates. Whether the acquired alignment data is suitable for solving the lattice models is checked for each lattice model. When the acquired alignment data is suitable for solving the lattice model, this lattice model is added to a subset of the plurality of lattice models. The lattice model with the least excess is selected. Besides the alignment data, metrological data can be obtained, by executing overlay measurement on a plurality of overlay marks on the plurality of substrates.;COPYRIGHT: (C)2007,JPO&INPIT