The energy filter, the transmission electron microscope and during mannered null operating in order filter

摘要

(57) Abstract This invention, paralleling to the optical axis (5), direction is something regarding the energy filter which receives the electron beam (72) which is decided. At the same time the said filter at inside the dispersion surface which is not included the deflector (30) which makes the beam deflect (72) which is received and is sent the optical axis (5) on the optical path (80) which enters into the dispersion surface by the deflector and has with the distributed device (40) which guides the beam which returns to the deflector. The said deflector, the optical axis at a state where it is matched, resets the beam which incidence is done from the distributed device. Without questioning whether the said deflector is the beam which keeps coming out is the beam which incidence is done, it has consisted of the single element which makes that the beam is made to deflect to converse direction secure. This invention is useful for the transmission electron microscope.