GLASS SUBSTRATE TREATING DEVICE, GLASS SUBSTRATE TREATING SYSTEM AND GLASS SUBSTRATE TREATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a glass substrate treating device miniaturizable in outline by shortening a heat treating time of a glass substrate to reduce the storage number of glass.;SOLUTION: The glass substrate treating device 1 has a heating chamber 2 whose six sides are covered with heat insulating walls 3 formed of a well-known heat insulating material. An exhaust duct 21 is mounted to the heating chamber 2. The exhaust duct 21 is connected to the top face of the heating chamber 2. A substrate placing member 30 and a plurality of halogen heaters 31 are provided in the heating chamber 2. The glass substrate 32 is heated mainly by the halogen heaters 31.;COPYRIGHT: (C)2007,JPO&INPIT