It consists of the oxide transparent electric conduction film and the target for the oxide transparent electric conduction film formation and the production manner and the electronic equipment of the substrate which has the oxide transparent electric conduction film ahead and the compound

摘要

PROBLEM TO BE SOLVED: To provide an oxide transparent conductive film capable of being finely etched in weak acid, having low connection resistance, superior in light transmittance, having low resistance in connecting TCP and free from fluctuation of resistance over aging, a target for manufacturing the same, and a method of manufacturing a substrate having the oxide transparent conductive film.;SOLUTION: This oxide transparent conductive film 6 is composed of a composite oxide containing indium oxide, tin oxide and zinc oxide, and has at least a connecting part 6a with another conductor, and a content of tin is more than that of zinc in the connecting part, and the connecting part has crystallinity. This target is composed of the composite oxide. Further, this method of manufacturing a substrate comprises forming a film of the composite oxide, and etching, patterning and afterwards heat-treating the same to obtain a substrate 2 having the oxide transparent conductive film 6 of low connecting resistance.;COPYRIGHT: (C)2001,JPO