METHOD FOR INSPECTING TRANSLUCENT ARTICLE MADE OF TRANSLUCENT MATERIAL, METHOD AND APPARATUS FOR INSPECTING DEFECT OF GLASS SUBSTRATE, GLASS SUBSTRATE FOR MASK BLANK, AND MANUFACTURING METHOD THEREFOR, MASK BLAND AND MANUFACTURING METHOD THEREFOR, MASK FOR EXPOSURE AND MANUFACTURING METHOD THEREFOR, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a translucent article inspection method, capable of accurately inspecting the presence or the absence of optical inhomogeneity in translucent articles.;SOLUTION: When an inspection light, having a wavelength of 200 nm or shorter, is introduced to a translucent article and that a section of which optical characteristics partly or locally change is present in an optical path, through which the inspection by detecting light propagates inside the translucent article, by detecting light emitted from the section and having wavelength longer than that of the inspection light is sensed, to inspect the presence or absence of optical homogeneity in the translucent article.;COPYRIGHT: (C)2007,JPO&INPIT